2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

SiC Warm-Wall LPCVD Growth on Multiple 50-mm Diameter Wafers

Guoguo Yan Jialiang Wen Guosheng Sun Hailei Wu Yongmei Zhao Jin Ning Lei Wang Wanshun Zhao Xingfang Liu Yiping Zeng

Zili Yu Michiel A.P. Pertijs Gerard C. M. Meijer

Zhe Zhao Sheng-zhuan Huang Feng Zhou

Yanfeng Li Nadia Rezzak Ronald D. Schrimpf Daniel M. Fleetwood Enxia Zhang Yanjun Wu Shuang Cai Jingqiu Wang Donglin Wang

Amiza Rasmi Arjuna Marzuki M. Rafie Che Rose A.Ismat A. Rahim

Jeong Beom Kim

Yan Ying-jian Zhu Wei-wei Duan Er-peng Li Zhi-qiang

Ting Gao Feng Zhou Wei Li Ning Li Junyan Ren

Kenji Natori

Jin-Cai Wen Ling-Ling Sun

Makoto Yoshimi Xavier Cauchy Christophe Maleville

Siliang Hua Qi Wang Hao Yan Donghui Wang Chaohuan Hou

Rui Song Dan Xie Tianling Ren

M. Asada S. Suzuki

Tsuyoshi Sekitani Koichi Ishida Makoto Takamiya Takayasu Sakurai Takao Someya

Iniguez Benjamin Pallares Josep Marsal Lluis F Castro-Carranza Alejandra Cerdeira Antonio Estrada Magali

Jeff Wu

Yue Zhang Miao Li Yan-Feng Li Xiao-Hua Ma Yan-Rong Cao Yue Hao

Yi-Chou Chen Wei-Chih Chien Yu-Yu Lin Feng-Ming Lee Kuang-Yeu Hsieh Chih-Yuan Lu

Chun-Yu Lin Ming-Dou Ker