Manufacturing Process of KDP Crystal by IBF Technology

摘要：

　　KH2PO4 (KDP) crystal is a kind of excellent nonlinear optical component used as laser frequency conversion unit in high power laser system.However, KDP crystal has raised a huge challenge to its fabrication of high precision, for KDP crystal has special physical and chemical characteristics.This paper proposes to utilize Ion beam figuring (IBF) technology to figure and clean the surface of KDP component.Many experiments have been done to validate and optimize this method.Finally, a KDP component with the size of 200×200×12mm is successfully processed by this method.

关键词： KDP IBF Heat deposition

作者: Furen Li Xuhui Xie Lin Zhou

作者单位: College of Mechatronics Engineering and Automation, National University of Defense Technology Changsha 410073, China;HuNan Key Laboratory of Ultra-precision Machining Technology, Changsha, Hunan 410073, China

会议类型: 国际会议

会议名称: The 12th China-Japan International Conference on Ultra-Precision Machining Processes (CJUMP 2016) (第十二届中日超精密加工国际会议)

会议地点: 长沙

会议语种:英文

页码: 95-99

在线出版日期: 2016-11-04（万方平台首次上网日期，不代表论文的发表时间）