Electrochemical mechanical composite polishing stainless steel substrate and the process optimization
A new method for the electrochemical mechanical composite polishing of thin film solar cells with flexible stainless steel substrate is presented in this paper, and through the process optimization to overcome the problems of processing stability cannot be sustained and surface brightness effect is not obvious, which caused by the passivation of single electrochemical machining.Set up the experiment device to the processing experiment , under the optimized process conditions that revolving speed of 1700 rpm, 8 v voltage, 0.2 mm Z-axis feed (P =5.4 KPa is pressure), 80 mm/min feed speed, the surfaceness Ra of flexible stainless steel substrate has been reduced from 124 nm to 13 nm (the measured area is 127.32 x 95.45 μm2), and mirror effect has been significantly improved;The light reflectivity has been increased from 56.8% to 62.4%, the phase of main material of the surface are Fe, Cr, Fe2O3 and Cr2O3;The material removal rate MRR is 0.026 g/min.
electrochemical mechanical composite polishing stainless steel substrate process optimization
Miaomiao Zhu Kehua Zhang Zhilan Xiao
College of Engineering, Zhejiang Normal University, Jinhua, Zhejiang Province, 321004, China
国际会议
长沙
英文
100-105
2016-11-04（万方平台首次上网日期，不代表论文的发表时间）