Analysis of Slurry Film Flow in Disc Hydrodynamic Polishing

摘要：

　　A novel polishing method called disc fluid hydrodynamic polishing (DFHP) is introduced in this paper.In the preliminary experiment, we used a disc tool with a center hole and a slurry comprising 95% deionized water and 5% CeO2 abrasives (400nm) to reduce the surface roughness (Ra) of a fused quartz sample and to keep the shape of the polished sample.A slurry feeding system was used to guide the pre-mixed slurry at the pressure 0.5Mpa to the machining region through the center hole.After two-hour processing, the roughness (Ra) of the sample is improved from 2-4nm to 0.6-1.6nm without varying the samples shape.Then, the experiment result is discussed, and some improvement projects are proposed to enhance the shaping ability of DFHP.

关键词： Polishing Fluid Hydrodynamic CFD Roughness

作者: Yan Li Bin Lin

作者单位: Key Laboratory of Advanced Ceramics, (Tianjin University) Ministry of Education, 300072, China Machining Technology, (Tianjin University) Ministry of Education, 300072, China

会议类型: 国际会议

会议名称: The 12th China-Japan International Conference on Ultra-Precision Machining Processes (CJUMP 2016) (第十二届中日超精密加工国际会议)

会议地点: 长沙

会议语种:英文

页码: 116-121

在线出版日期: 2016-11-04（万方平台首次上网日期，不代表论文的发表时间）