Error Analysis of Radial Error Motion Measurement of Ultra-precision Axis of Rotation
This paper gives an error analysis of radial error motion measurement including nonlinearity error of capacitive displacement probes, misalignment error of probes, eccentric error of artifact ball and error induced by different error separating methods.Firstly, nonlinearity of a capacitive displacement probe targeting a spherical surface is investigated through experiment and the phenomena of fake displacement induced by lateral offset of the probe relative to an artifact ball is discussed.It is shown that the error motion in radial and axial direction and eccentric rotation of artifact ball will both induce lateral offset which causes a fake output of probes.Moreover, measurement error induced by angular positioning error for three famous error separating methods is detailed.
error motion spindle metrology ultra-precision spindle error analysis
Qiang Shu Qiu Hu
National machine tool production supervision and testing centre, Mianyang, China
国际会议
长沙
英文
176-182
2016-11-04（万方平台首次上网日期，不代表论文的发表时间）