New figuring model based on surface slope profiles
Surface slope profile is widely used in the metrology of grazing incidence reflective optics instead of surface height profile.Nevertheless, the theoretical and experimental model currently used in deterministic optical figuring processes is based on surface height, not on surface slope.This means that the raw slope profile data from metrology need to be converted to height profile to perform the current height-based figuring processes.The inevitable measurement noise in the raw slope data will introduce significant cumulative error in the resultant height profiles.As a consequence, this conversion will degrade the determinism of the figuring processes, and will have an impact on the ultimate surface figuring results.To overcome this problem, we proposed an innovative figuring model, which directly uses the raw slope profile data instead of the usual height data as input for deterministic process.In this paper, first the influence of the measurement noise on the resultant height profile is analyzed, and then a new model is presented, finally a demonstration experiment was carded out using a one-dimensional ion beam figuring process to demonstrate the validity of our approach.
ion beam figuring surface slope synchrotron optics
Lin Zhou Yong Li
College of Mechatronic Engineering and Automation, National University of Defense Technology 109 Deya Rd, Changsha, Hunan, 410073, China
国际会议
长沙
英文
183-188
2016-11-04（万方平台首次上网日期，不代表论文的发表时间）