Reactive Magnetron Sputtering of CuInS<,2> Solar Cells –The Influence of the Deposition Conditions on Structural and Electronic Properties and Solar Cell Efficiency
The Electrical, Optical and Structural Characteris-tics of N-type Microcrystalline Silicon Thin Films Deposited by TCP-CVD
High-rate Deposition of Silicon Nitride and Silicon Oxide Films for Surface Passivation and (anti) re-flection Coating Applications