MODELING AND SIMULATION OF ALUMINIUM NITRIDE-BASED PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER FOR ULTRASOUND IMAGING

摘要：

　　In this work,a PMUT based on Pt/AlN/Pt/TiO2/SiO2/Si structure with square suspended membrane is proposed and modeled by performing finite element method (FEM) software COMSOL.The vibration mode,resonant frequency and effective electro-mechanical coupling coefficient (keff2) of the proposed AlN-based PMUT are analyzed.It is shown that the (0,1) resonant mode of PMUT reaches up to 25.73 MHz when the AlN thickness is 1μm.Moreover,the influences on the sensitivity of geometric parameters,i.e.,the side length and thickness of top electrode,and the thickness of AlN thin film,are investigated.Maximum transmitting and receiving sensitivity of 32.79 pm/V and 0.478mV/kPa,respectively,are obtainable with optimum geometric parameters.Investigation results demonstrate that by optimizing the structure of the proposed AlN-based PMUT,keff2 and sensitivity are significantly improved,which is beneficial for meets the requirement for application of high resolution ultrasound imaging.

关键词： PMUT Aluminium Nitride Finite Element Method

作者: Ming-zhu CHEN Qiao-zhen ZHANG Xiang-yong ZHAO Fei-fei WANG

作者单位: Shanghai Normal University, Shanghai, 200234, P.R.China

会议类型: 国际会议

会议名称: The 2019 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2019(第14届)全国压电和声波理论及器件技术研讨会)

会议地点: 石家庄

会议语种:英文

页码: 112-116

在线出版日期: 2019-11-01（万方平台首次上网日期，不代表论文的发表时间）