FEM MODELING RAYLEIGH WAVE SENSORS BASED ON GO/SiO2/128° YX-LiNbO3 STRUCTURES
3D-finite element method (3D-FEM) is used to investigate the characteristics of Rayleigh wave devices based on GO(Graphene Oxide)/SiO2/IDT(inter-digital transducer)/128°YX-LiNbO3 structures,including the phase velocity vp,electromechanical coupling coefficient k2,and gas sensing properties.The results show that the GO layersimprove the characteristics of the Rayleigh wave devices,that is,vp and k2 are increased by the introduction of GO films.And thek2 of 9.32% associated with phase velocity of 4517m/s have obtained as hs/λ=0.01 and hGO=0.5μm,which are higher than that of GO free Rayleigh wave device.Meanwhile,the gas sensing sensitivity of theRayleigh wave sensor is also enhanced by GO layers.Therefore,GO is an ideal material for constructing SAW sensors for widespread applications.
Graphene oxide (GO) film Rayleigh wave device 3D-Finite element method Gassensor
Yan WANG Xiao-qing LIU Shu-lin SHANG Xun XU
College of Electronic and Optical Engineering & College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing, 210046, P.R.China
国际会议
石家庄
英文
362-366
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）