CHARACTERISTICS OF LOVE WAVE DEVICE WITH NI PILLARS ON ZNO/R-SAPPHIRE STRUCTURE
Phononic crystals (PnCs) have attracted considerable attention in recent years because of the ability to control and manipulate acoustic and elastic wave propagation.A Love wave device composed of Nickel pillars on (110)ZnO/R-sapphire substrate is constructed by using COMSOL Multiphysics.The characteristics of the device,including the phase velocity (vp) and the electromechanical coupling coefficient (k2),are theoretically analyzed by finite element method (FEM).The results show that the 1st mode of love waves appear at hZnO/λ=0.0625,while the point of occurrence is 0.31 at PnCs-free SAW structure.And the maximum electromechanical coupling coefficient(k2) of 3.27% is obtained by optimizing the structure of Nickel pillars,which is much higher than that of PnCs-free structure.All of the results indicate that the performances of the love wave device based on Nickel pillars/(110)ZnO/R-sapphire structure are superior to that of PnCs-free structure.And it provides a theoretical basis for designing Love wave devices with high frequency.
Phononic Crystals Finite Element Method Electromechanical Coupling Coefficient
Xiao-qing LIU Shu-lin SHANG Yan WANG Su-peng LIANG
College of Electronic and Optical Engineering & college of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing, 210046, P.R.China
国际会议
石家庄
英文
373-377
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）