A FAST APPROACH FOR THE STRUCTURAL DESIGN OF FRAME-LIKE FBAR BASED ON 2D PLATE THEORY
In recent years,film bulk acoustic wave resonators (FBARs) have been successfully utilized in almost every wireless system due to their good performance.To optimize the working performance of FBAR,frame-like structure was previously proposed to suppress the resonances of so-called spurious modes.Another aspect that has impact on the working performance of FBAR is the undesired coupling modes,which were rarely studied due to the lack of proper theoretical tools.In this paper,a fast approach for the structural design of frame-like FBARs is proposed with the use of two-dimensional plate theory.The widely used state-vector approach is applied here and both free and forced vibration results are obtained.The structure size of frame-like FBAR is determined through the analysis of frequency spectra and the results are compared with those obtained with 3D FEM software to ensure the accuracy of our proposed method.Mode shapes and admittance response curves show the suppression ability of spurious modes and the undesired coupling modes in the designed frame-like structure.Results in this paper show that the presented method can work as an effective tool in engineering design process.
Frame-like FBAR Coupling vibrations Spurious modes 2D plate theory State-vector approach
Nian LI Bin WANG Zheng-hua QIAN
State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering,Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
国际会议
石家庄
英文
397-401
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）