会议专题

STRAIN SENSITIVITY OF EPOXY-QUARTZ PACKAGED SAW STRAIN SENSORS

  A SAW strain sensor with new simplified Epoxy-Quartz packaging is analyzed in this paper.The strain sensitivity of sensors with Epoxy-Quartz Package is calculated with perturbation theory and finite element method theoretically.The sensitivity is close to the sensitivities of traditional AQP,which are 3.20 ppm /με and 3.32 respectively.Then an Epoxy-Quartz Packaged 433MHz SAW strain sensor is fabricated by using the epoxy EP-4 adhesive.An experimental platform is set up and the strain sensitivity of Epoxy-Quartz Packaged is measured at 20 ℃.The experimental results indicate that strain sensitivity of Epoxy-Quartz Packaged is 2.51,which almost agrees with theoretical results.Therefore,a new simplified package for SAW strain sensor with a relatively high strain sensitivity is verified in this paper.

Surface acoustic wave Kalman algorithm Localization

Peng-xu LI Hong-lang LI Li-na CHENG Ya-bing KE Ya-hui TIAN

Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190;University of Chines National Center for Nanoscience and Technology, Beijing, P.R.China, 100190 Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190

国际会议

The 2019 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2019(第14届)全国压电和声波理论及器件技术研讨会)

石家庄

英文

410-413

2019-11-01(万方平台首次上网日期,不代表论文的发表时间)