STRAIN SENSITIVITY OF EPOXY-QUARTZ PACKAGED SAW STRAIN SENSORS
A SAW strain sensor with new simplified Epoxy-Quartz packaging is analyzed in this paper.The strain sensitivity of sensors with Epoxy-Quartz Package is calculated with perturbation theory and finite element method theoretically.The sensitivity is close to the sensitivities of traditional AQP,which are 3.20 ppm /με and 3.32 respectively.Then an Epoxy-Quartz Packaged 433MHz SAW strain sensor is fabricated by using the epoxy EP-4 adhesive.An experimental platform is set up and the strain sensitivity of Epoxy-Quartz Packaged is measured at 20 ℃.The experimental results indicate that strain sensitivity of Epoxy-Quartz Packaged is 2.51,which almost agrees with theoretical results.Therefore,a new simplified package for SAW strain sensor with a relatively high strain sensitivity is verified in this paper.
Surface acoustic wave Kalman algorithm Localization
Peng-xu LI Hong-lang LI Li-na CHENG Ya-bing KE Ya-hui TIAN
Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190;University of Chines National Center for Nanoscience and Technology, Beijing, P.R.China, 100190 Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R.China, 100190
国际会议
石家庄
英文
410-413
2019-11-01(万方平台首次上网日期,不代表论文的发表时间)