AN ANALYSIS OF VIBRATIONS OF ELASTIC CUBOIDS COVERED WITH THIN FILMS
In modern products from advanced manufacturing process like semiconductor and electronic device industries,thin films are frequently utilized for essential functions such as conductive layers and functional elements for various applications.With sophisticated processing techniques,thin films can be coated on surfaces of various substrates with relatively thin thickness and desired planner patterns to satisfy application needs.It is natural to be concerned with materials and physical properties of films,but there is no easy answer due to the complicated processing technology.In this study,we start with the vibration analysis of a cuboid sample coated with thin films on bothsides with the Rayleigh-Ritz method.With one displacement functions in the entire structure,strain and kinetic energies are calculated with the consideration of different material properties and sizes,providing the basis for the determination of unknown properties of materials through frequency solutions.By combining this analysis with the RUSpec technique,we can obtain the physical properties of the thin film layers based on the frequency variations.With the advantages of easeof use and simple sample preparation,this will be a simple and accurate method for the evaluation of physical properties of thin films.
Thin film Cuboid Vibration frequency Rayleigh-Ritz method Elastic constants
Feng-ling HANG Yang-yang ZHANG Ai-bing ZHANG TaoZHANG Jian-ke DU Ji WANG
Piezoelectric Device Lab, School of Mech Eng and Mechanics, Ningbo University, Ningbo, Zhejiang 3152 Micro-/Nano-Integration Lab, Xian University of Science and Technology, Xian, Shanxi 710054, CHINA
国际会议
石家庄
英文
432-436
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）