OPTIMAL DESIGN ON SAW STRAIN SENSOR AT HIGH-TEMPERATURE
Nowadays,strain online monitoring technology of high-temperature components plays an important role in ensuring accurate operation and safe production in the fields of aerospace,nuclear power and power plants.A SAW high-temperature strain sensor employing composite structure of based Al2O3/IDTs/AlN/Metal/Al2O3 is proposed to obtain strain information at extreme high-temperature environment.Obviously,high performance as Q-value and low insertion loss of the sensing chip is the key for achieving successful wireless strain sensing system.In this work,the theoretical simulation by using the finite element method (FEM) analysis was performed to realize the SAW propagation in multi-layered composite structures,and corresponding coupling of modes (COM) parameter was extracted.On this basis,the optimal design on the SAW high-temperature strain sensing device was realized.
SAW A1N Piezoelectric Film High-Temperature Finite Element Method Coupling of Modes
Shu-yao FAN Wen WANG Xue-ling LI
Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Aca Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
国际会议
石家庄
英文
514-518
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）