SENSITIVITY IMPROVEMENT OF TBDYFE THIN-FILM COATED SAW-BASED CURRENT SENSOR
In this paper,a novel surface acoustic wave current sensor combining SAW technology and magnetostrictive material is proposed.The typical structure of the sensor is a surface acoustic wave device surface sputtered hysteresis film based on planar lithography.The magnetic sensitive materials with high magnetostriction coefficient are a key factor.In this paper,the TbDyFe giant magnetostrictive film with better performance is used to induce the magnetostrictive strain by applying a magnetic field induced by current,which causes the SAW propagation speed to change.The applied current is evaluated using the differential oscillation frequency offset of the differential delay line oscillating loop.Current experiments show that the current sensor proposed in this paper has high sensitivity and good linearity.
Surface acoustic wave Current sensor Magnetostrictive effect TbDyFe Differential oscillator
Yuan Sun Wen Wang Ya-na Jia Shu-yao Fan Yong Liang
Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R 100190, China;University of Chines Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R 100190, China
国际会议
石家庄
英文
519-522
2019-11-01（万方平台首次上网日期，不代表论文的发表时间）