Micropyramid silicon wafer with ZnO nanowires as high efficiency piezoelectric nanogenerator

摘要：

　　The piezoelectric nanogenerator(PENG)is an important landmark in the development nanotechnology.The PENG,conventing mechanical energy to electrical energy in nanoscale,relies on the coupling of piezoelectric and semiconducting properties of nanomaterials.This approach offers a potential solution for harvesting energy from the environment for self-powered nanotechnology.How to improve the conversion efficiency is still one of the most factors for current PENG.Here,based on the fundamental research of piezoelectric nanogenerators,we propose a simple,robust,and scalable approach for fabricating a nanowire nanogenerator in which,ZnO nanowires is grown on the micro-pyramid textured surface of the silicon wafer and then a nanogenerator is fabricated by simply combine two substrates with ZnO nanowires face-to-face.The proposed geometry allows the nanogenerator to collect multi-faceted mechanical energy.This pyramid structure of the ZnONWs nanogenerators can generate piezoelectric current with an average signal about 3nA when the device was drove by ultrasonic waves at 40 kHz.

关键词： ZnO nanowires nanogenerator pyramid Si piezoelectric effect

作者: Xuecheng Yu Leicong Zhang Wen Jiang Pengli Zhu Hairong Zheng Rong Sun Ching-Ping Wong

作者单位: Guangdong Provincial Key Laboratory of Materials for High Density Electronic Packaging Shenzhen Inst Guangdong Provincial Key Laboratory of Materials for High Density Electronic Packaging Shenzhen Inst Department of Electronics Engineering The Chinese University of Hong Kong Hong Kong,China;School of

会议类型: 国际会议

会议名称: 第十九届国际电子封装技术会议(ICEPT 2018)

会议地点: 上海

会议语种:英文

页码: 288-291

在线出版日期: 2018-08-08（万方平台首次上网日期，不代表论文的发表时间）