A Micro-Hotplate for MEMS Based Gas Sensor

摘要：

　　This work designed a micro-hotplate for micro-electromechanical systems(MEMS)based gas sensor,in which the heating electrode and the test electrode are placed on the same plane.The micro-hotplate with four pins was optimized the finite element analysis method.The heating electrode and test electrode were made of platinum.The working temperature of heating electrode was controlled by the voltage of heating electrode and calibrated through the linear resistance-temperature characteristic curve and relation curve of voltage and resistance.Infrared thermography microscope directly observed the temperature distribution of the heating electrode at different voltages.The micro-hotplate was used for ethanol detecting based on SnO2 nanosheets and the response reached at 21.4 in 100 ppm ethanol gas.

关键词： micro-hotplate MEMS gas sensor

作者: Gaoqiang Niu Lingxiang He Zhitao Yang Changhui Zhao Hiuming Gong Wei He Fei Wang

作者单位: Southern University of Science and Technolog Department of Electrical and Electronic Engineering She Shenzhen University Department of Optoelectronic Engineering Shenzhen,China

会议类型: 国际会议

会议名称: 第十九届国际电子封装技术会议(ICEPT 2018)

会议地点: 上海

会议语种:英文

页码: 749-752

在线出版日期: 2018-08-08（万方平台首次上网日期，不代表论文的发表时间）