Electrodeposition of anisotropic NiFe thin films for integrated high-frequency micro-inductor
NiFe thin films were fabricated on wafer by applying 100mT external magnetic field during electroplating,and the function of in-plane parallel magnetic field in the course of the plating experiment and magnetic properties have been studied in this paper.Magnetic measurements show that in-plane anisotropy field can be abtained by magnet-electroplating,and the magnetic properties are very sensitive to the thickness of film.The Ni70Fe30film with thickness of both 0.6μm and1.2μm exhibit significantly uniaxial surface anisotropy and the complex permeability of the direction of parallel magnetic field can reach about 220while 2μm NiFe thin film does not have a uniaxial magnetic anisotropy.The results also show that the ferromagnetic-resonance frequency(FMR)can run up to500Mzwhen the thickness is suitable,which is an essential performance in the design of micro-inductor devices.
micro-inductor NiFe thin film in-plane anisotropy magnetic electroplating
Lin-Lin Yang Li-Yin Gao Chunhuan Chen Zhi-Quan Liu
School of Materials Science and Engineering,Dalian Jiaotong University,Dalian 116024,China;Institute Institute of Metal Research,Chinese Academy of Sciences,Shenyang 110016,China School of Materials Science and Engineering,Dalian Jiaotong University,Dalian 116024,China
国际会议
上海
英文
1241-1245
2018-08-08（万方平台首次上网日期，不代表论文的发表时间）