Fabrication and characterization of AlN based Piezoelectric Micromachined Ultrasonic Transducer for contact sensing

摘要：

　　In this paper,we present an aluminum nitride(AlN)based Piezoelectric Micro-machined Ultrasonic Transducer(PMUT)for contact sensing,which is a suspended stacked layers Si/Mo electrode/AlN/Al electrode in Silicon substrate.In order to obtain a Si elastic layer with a small thickness,DRIE Si process is utilized to make a deep cavity on the backside of Si substrate to suspend the stacked layers of PMUT device.AlN based PMUT sample is fabricated,having a suspended stacked layers of Si/Mo/AlN/Al measured about 5μm/0.1μm/0.8μm/1μm respectively in the thickness,100μm in the radius of Si film.The AlN film has a measured surface roughness of 5nm by AFM and has(001)orientation peak by XRD analysis.

关键词： AlN PMUT characterization

作者: Dan Gong Han Cai Yanming Xia Shenglin Ma HuanLiu Yihsiang Chiu Yufeng Jin

作者单位: Department of Mechanical & Electrical Engineering,Xiamen University,Xiamen,Fujian,China Peking University Shenzhen Graduate School,Shenzhen,China

会议类型: 国际会议

会议名称: 第十九届国际电子封装技术会议(ICEPT 2018)

会议地点: 上海

会议语种:英文

页码: 1442-1447

在线出版日期: 2018-08-08（万方平台首次上网日期，不代表论文的发表时间）