Design of incremental grating ruler online measuring-displacement system based on LabVIEW
To accommodate the requirements of precise displacement feedback devices in micro-electronic technology,an on-line measurement system of the grating ruler is designed.This system uses a kind of virtual instrument called LabVIEW and digital image processing technology to detect the displacement,that consists of the PXI case of National Instruments,the frame grabber and the precision motion platform.The experimental tests demonstrate that in the distance range of 150 mm,the motor speed is within 1.25 mm/s,the maximum displacement error within 0.04mm.This system is simple,can be operated-controlled in real time and observed-debugged online.Its not only adapts to the measuring-displacement,but also suits the surface detection,encapsulation and other fields in the microelectronics manufacturing.
Grating LabVIEW Digital image virtual instrument Displacement measurement Micro-electronic technology
Li YanFeng Yang ZhiJun Sun Han Xiong ShaoWang Li Qian
Guangdong University of Technology,School of Electromechanical Engineering,Guangdong Provincial Key Laboratory of Micro-Nano manufacturing Technology and Equipment,Guangzhou,510006,China
国际会议
上海
英文
1615-1618
2018-08-08（万方平台首次上网日期，不代表论文的发表时间）