Study on the ZrO2 Thin Films with Spectroscopic Ellipsometry

摘要：

　　In order to get the optical properties of ZrO2 thin film, two samples deposited on K9 glass which produced by optical automatic vacuum coating machine were measured and analyzed with spectroscopic ellipsometry. For sample 1, both Cauchy model and Tauc-Lorentz model can be well described the properties of thin film. For sample 2, by dividing the film into three layers, got the smallest mean square error, and the thickness was closest to the calculated value of TFCalc film design software. Meanwhile, got the refractive index curve in the spectrum range from 380nm to 2250nm. The results has certain reference value to the preparation and design of ZrO2 multilayer films.

关键词： ZrO2 thin film spectroscopic ellipsometry optical properties

作者: Tang Fanbin Deng Guangqing Lan Chunxiang Qin Zhenpeng Zhu Tianxia

作者单位: Public Education Department of Nanning University, Nanning 530200, China

会议类型: 国际会议

会议名称: 2019 6th International Conference on Machinery, Mechanics, Materials and Computer Engineering (MMMCE 2019)(2019 第六届机械、材料和计算机工程国际会议)

会议地点: 呼和浩特

会议语种:英文

页码: 261-266

在线出版日期: 2019-07-27（万方平台首次上网日期，不代表论文的发表时间）