Development and Experiment of an XθYθZ Micro-motion Stage Based on a Straight-Beam Three-Quarter Round Type Flexure Hinge
This paper proposes a type of straight-beam three-quater round type(STR)flexure hinge for a micro-actuation motion stage in the field of precision micro-operation manufacturing.Based on the hinge,a three degree-of-freedom precision parallel micro-motion stage is designed.Firstly,the rigid and flexure structural design of the STR flexure hinge is presented,and theoretical analysis and simulation performance verification are carried out.Based on the elastic statics and calculus theory,the flexibility expression of the flexure hinge is derived under different stresses.The flexibility of the hinge is verified by ANSYS software.The results show that the designed flexure hinge can effectively achieve complaisant deflection and rigid support with high stress.Moreover,a XθYθZ micro-motion stage based on the STR hinge is established,and the dynamic performance of the stage is simulated and verified by Matlab/Simulink.Finally,the experimental stage is set up.The experimental results are compared with the simulation results,and the stage can achieve about 3.7 times micro-actuation amplification ratio and 68 lm displacement stroke.
Micro-motion stage Flexure hinge Parallel mechanism Precision micromotion operation
Junlang Liang Lanyu Zhang Jian Gao Gengjun Zhong Guangtong Zhao Jindi Zhang
Laboratory of Electronic Precision Manufacturing Equipment and Technology of Ministry of Education,G Laboratory of Electronic Precision Manufacturing Equipment and Technology of Ministry of Education,G
国际会议
浙江湖州
英文
380-393
2019-08-12（万方平台首次上网日期，不代表论文的发表时间）