Flexible 3D MEMS through mechanically-guided assembly

摘要：

The development of strategies for forming 3D micro and nanostructures in advanced materials is of increasing interest, driven by the potential for creating material systems with fundamentally new characteristics and functionalities. Existing approaches of 3D assembly/fabrication, however, can only be used directly with a narrow range of materials and/or 3D geometries.

关键词： mechanically-guided assembly 3D assembly buckling 3D MEMS flexible electronics

作者: Yihui Zhang

作者单位: Tsinghua University

会议类型: 国际会议

会议名称: The 7th International Conference on Smart Materials and Nanotechnology in Engineering (第7届智能材料与纳米技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 1-1

在线出版日期: 2019-09-20（万方平台首次上网日期，不代表论文的发表时间）