Design and Analysis on the Structure of Fixed-Supported Quadri-Cantilevers of High g Value MEMS Acceleration Sensor

摘要：

1 Introduction The sensors manufactured by the MEMS(Micro-Electro-Mechanical-Systems) technology have more powerful functions and wider applications1,2.Especially,it has a great influence on the performance improvement of cantilever sensor working with piezoresistive effect3.

关键词： Quadri-Cantilever MEMS acceleration sensor High g value ANSYS analysis

作者: JUXIN XUEHAO WENXI

作者单位: China Academy of Aerospace Aerodynamics,No.17,Yungang West Road,Fengtai Dist,Beijing,China Heilongjiang University,No.74,Xuefu Road,Nangang Dist,Harbin,China

会议类型: 国际会议

会议名称: The 7th International Conference on Smart Materials and Nanotechnology in Engineering (第7届智能材料与纳米技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 1-2

在线出版日期: 2019-09-20（万方平台首次上网日期，不代表论文的发表时间）