Fabrication of Corrugated Silver Diaphragm and its Application in EFPI Acoustic Sensor

摘要：

1 Introduction Diaphragm-based extrinsic Fabry-Perot interfero-metric(DEFPI) sensor have attracted more and more attention for its advantages of lightweight,compact size and immune to electromagnetic interference.The DEFPI sensor is often formed by the fiber end and a diaphragm that will response to the incident acoustic.

关键词： Corrugated Silver EFPI Acoustic Sensor

作者: XIQU ZHANG YANG LIU AILIN WANG JIE LIN XING WANG BIN LIU

作者单位: College of Information and Communication Engineering,Harbin Engineering University,Harbin,China Institute of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Ha Shanghai Aerospace Control Technology Institute,Shanghai,201109,China

会议类型: 国际会议

会议名称: The 7th International Conference on Smart Materials and Nanotechnology in Engineering (第7届智能材料与纳米技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 1-2

在线出版日期: 2019-09-20（万方平台首次上网日期，不代表论文的发表时间）