Welding and sealing of quartz glass with femtosecond laser pulse

摘要：

The welding and sealing of quartz glass are vital for MEMS sensors and photoelectronic devices.Here,a method to weld and seal quartz glass by using femtosecond laser pulse is investigated.The femtosecond laser pulses are focused at the interface of two-piece of glasses by an objective.Because of the pulse with high energy,the material near the focusing spot is melting and resolidifying.

关键词： femtosecond laser laser material processing quartz glass welding sealing

作者: YANG YIN YALU GUAN JIE LIN PENG JIN

作者单位: Institute of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Ha Institute of Ultra-Precision Optoelectronic Instrument Engineering,Harbin Institute of Technology,Ha

会议类型: 国际会议

会议名称: The 7th International Conference on Smart Materials and Nanotechnology in Engineering (第7届智能材料与纳米技术国际会议)

会议地点: 哈尔滨

会议语种:英文

页码: 1-2

在线出版日期: 2019-09-20（万方平台首次上网日期，不代表论文的发表时间）