DEVELOPMENT OF A SURFACE ACOUSTIC WAVE DELAY LINE DEVICE FOR SENSING ICE
In this work, a surface acoustic wave device with delay line pattern with operation frequency of 200MHz was developed for sensing ice.Y-cut 35° quartz was employed as piezoelectric crystal, which exhibits excellent temperature stability.A SiO2 thin-film was coated onto the SAW device after the photolithographic deposition of interdigital transducers (IDTs) to protect the metal electrodes in process of ice formation.The developed SAW sensing chip was characterized by using the high-low temperature chamber.When the temperature in chamber was dropped to the freezing point, a sharp change in frequency of the sensing device was observed because of the mass loading effect from the ice layer.The theoretical results obtained by solving the acoustic wave equations in layered structure offers a clear explanation for the phenomenon observed.Obviously, fast and distinct response towards ice accretion was achieved from the developed SAW device, which indicates that it is very promising for sensing ice.
Surface acoustic wave Delay line Ice sensor Mass load Frequency variation
Yi-ning YIN Wen WANG Ya-na JIA Xu-feng XUE Yong LIANG
Institute of Acoustics, Chinese Academy of Sciences, Beijing, 100190, P.R.China;University of Chines Institute of Acoustics, Chinese Academy of Sciences, Beijing, 100190, P.R.China
国际会议
哈尔滨
英文
130-134
2019-01-11（万方平台首次上网日期，不代表论文的发表时间）