EFFECT OF ANNEALING TEMPERATURES ON ELECTRODE SURFACE ROUGHNESS AND SENSITIVITY OF THE SAW DETECTORS IN SAW GCS

摘要：

　　In this paper, the effect of annealing temperatures on electrode surface roughness and on sensitivity of the SAW detectors in SAW GCS(surface acoustic wave gas Chromatography system) were studied.The electrode surface roughness of the surface acoustic wave (SAW) detector was changed by annealing at different temperatures.The annealing temperatures of 25℃, 200℃ and 300℃ were chosen for the experiment, and we got that 200℃ had the largest electrode roughness.Finally,the SAW detectors obtained at different above mentioned annealing temperatures were used in SAW GC system to detect dimethyl methylphosphonate (DMMP).The responses have shown that with the increase of annealing temperature, the sensitivity improved obviously for DMMP.

关键词： Surface acoustic wave detector Annealing temperature Sensitivity Electrode surface roughness

作者: Wen-qiang ZHAO Yan AN Jiu-ling LIU Ming-hua LIU Shi-tang HE

作者单位: Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Aca Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China

会议类型: 国际会议

会议名称: The 2019 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2019(第13届)全国压电和声波理论及器件技术研讨会)

会议地点: 哈尔滨

会议语种:英文

页码: 135-138

在线出版日期: 2019-01-11（万方平台首次上网日期，不代表论文的发表时间）