STRUCTURE OPTIMIZATION OF SURFACE ACOUSTIC WAVE BASED PARTICULATE MATTER 2.5 MONITOR
This paper presents an optimal design on surface wave acoustic based particulate matter 2.5 monitor by improving the hot source structure in the monitor system.A kind of micro-heater was made on the quartz glass substrate based on MEMS technology, replacing the semiconductor chilling plate as the hot source of the PM2.5 monitor, and providing the temperature gradient field required for the particulate matter deposition.The structure of the monitor is optimized by integrating the fabricated micro-heater and the micro-channel module.In addition, the commercial software COMSOL is used to simulate the temperature distribution of the designed micro-heater.Finally, the performance of the MEMS micro-heater fabricated was experimentally verified.
Surface acoustic wave monitor Particulate matter MEMS Micro-heater
Wen-qiang ZHAO Jiu-ling LIU Ming-hua LIU Shi-tang HE
Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R 100190, China;University of Chines Institute of Acoustics, Chinese Academy of Sciences, Beijing, P.R 100190, China
国际会议
哈尔滨
英文
139-142
2019-01-11（万方平台首次上网日期，不代表论文的发表时间）