SPHERICAL SHAPE ULTRASONIC MOTOR WITH TWO DEGREES OF FREEDOM
In this paper, a spherical shape ultrasonic motor with two-DOF is proposed and manufactured.The motor is composed of one spherical shape rotor and two stators constituted with an elastomer and eight pieces of piezoelectric ceramic plates.The bending modes B11 and B12 are selected as the working modes of the upper stator and the lower stator, respectively.The spherical rotor can achieve two degrees of freedom motion by friction influence.It is easy to be miniaturized with the advantages of simple structure and no polarized partition for piezoelectric ceramic plates.Mechanical characteristic tests results show that the motor can reach maximum speed with 769.8deg/s at the driving voltage of 300Vpp.It has high displacement resolution with 500μrad around x-axis and 200μrad around y-axis at voltage of 200Vpp, respectively.It has potential applications in including but not limited to miniature lens or sensor driving.
Ultrasonic motor Two-DOF Spherical rotor Annular plate
Hai-qian CHEN Ying YANG Xin HONG Jian-min QIU Xiu-xiu LI
College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 21001 College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 21001
国际会议
哈尔滨
英文
401-405
2019-01-11（万方平台首次上网日期，不代表论文的发表时间）