DESIGN AND OPTIMIZATION FOR DOUBLE-SIDED INTERDIGITAL TRANSDUCER WITH PIEZOELECTRIC SUBSTRATE
The interdigital transducer (IDT) is the most basic unit of the surface acoustic wave device.The optimization design of double sides IDT can make contribution to the improvement of driving performance.In this paper, the finite element analysis method was used to calculate the influence between the geometry parameters and the driving performance of double-sided IDT based on a piezoelectric substrate utilizing COMSOL Multiphysics.And the effect of electrode width and electrode gap on the driving strain under IDT unit voltage was also analyzed.The results show that the smaller the thickness of the substrate, the more helpful of improving the driving sensitivity of the IDT.The driving voltage was reducing with the decreasing of the electrode gap.And the optimal piezoelectric driving performance can be obtained when w/t =0.33.This work provides theoretical guidance for the optimal design of double-sided IDT.
Optimization Surface acoustic wave Interdigital transducer Piezoelectric
Lei QIAN Zi-ping WANG Xing-jia LI Yue FEI Jie ZHAO
Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang, 212013, China Faculty of Civil Engineering and Mechanics, Jiangsu University, Zhenjiang, 212013, China;National Ce
国际会议
哈尔滨
英文
425-428
2019-01-11（万方平台首次上网日期，不代表论文的发表时间）