THE ACCELEROMETER UTILIZING THE TRANSVERSE VIBRATION MODE OF LGT PIEZOELECTRIC CRYSTAL

摘要：

　　A transverse-vibration-mode piezoelectric accelerometer using La3Ga5.5Ta0.5O14 (LGT) single crystal was designed and fabricated for potential high temperature sensing applications.Dynamic modeling of the accelerometer based on the transverse-vibration-mode of LGT crystal was presented first, followed by crystal cut preparation, sensor design and assembly,experimental setup establishment and sensing test.The prototype of transverse-vibration-mode piezoelectric accelerometer was tested in the temperature range of 20℃~350℃ under 160Hz.The average sensitivity of the prototype was evaluated to be 3.3 pC/g over the tested temperature range and the linearity reached 1.2%.This work might supply an approach for design and fabrication of new piezoelectric accelerometers using the transverse-vibration-mode of piezoelectric crystal materials.

关键词： LGT crystal Piezoelectric accelerometer Transverse-vibration-mode

作者: Guang-da WU Xue-liang LIU Fa-peng YU Fang-lin LI Shi-wei TIAN Xiu-feng CHENG Xian ZHAO

作者单位: State Key Laboratory of Crystal Materials, Shandong University, Jinan, 250100, P.R.China

会议类型: 国际会议

会议名称: The 2019 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2019(第13届)全国压电和声波理论及器件技术研讨会)

会议地点: 哈尔滨

会议语种:英文

页码: 429-433

在线出版日期: 2019-01-11（万方平台首次上网日期，不代表论文的发表时间）