THE INFLUENCE OF DIFFERENT ELECTRODE MATERIALS ON THE SENSITIVITY OF SAW DETECTOR

摘要：

　　As the interdigital transducer(IDTs) material in the SAW gas detector combined with the gas chromatography is vulnerable to the corrosion of the gas environment, this paper studied the influence of the Al/Au double-layer electrode structure on its sensitivity when the thickness of the Au is 0.04μm and the thickness of the Al increases continuously.The finite element software COMSOL was used to simulate the oscillating SAW gas detector in mode 1-3, and the classical coupling of modes (COM) theory was combined to extract the optimized structural parameters.Simulation results show that when the thickness of aluminum is approximately 3-4 times that of gold, the performance of the sensor is the best.

关键词： GC/SAW Al/Au double electrode Frequency response Sensitivity

作者: Liang-tao ZOU Jiu-ling LIU Ming-hua LIU Shi-tang HE

作者单位: Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China;University of Chinese Aca Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China

会议类型: 国际会议

会议名称: The 2019 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2019(第13届)全国压电和声波理论及器件技术研讨会)

会议地点: 哈尔滨

会议语种:英文

页码: 443-445

在线出版日期: 2019-01-11（万方平台首次上网日期，不代表论文的发表时间）