The technology research on transient piezoresistive ultra-high pressure sensor
A transient piezoresistive ultra-high pressure sensor was provided aimed at the problems of that present pressure sensor can not adapt the environment under high pressure, high temperature and high impact.The sensor works with the Wheatstone half bridge theory, the sensitive element is made of well-piezoresistive alloy manufactured by SiGeMnCu.By improving production process and assembly method, the sensor can realize 0~800MPa dynamic pressure testing under transient high pressure and high temperature condition.The contrast analysis result shows that the nonlinear error of sensor is not greater than 0.5% under all the conditions of high, low and normal temperature respectively.The sensor has advantages of high sensitivity, small volume and flexible installation.It can be widely used in pressure testing and research on high pressure gun and closed bomb.
Ultra-high pressure Piezoresistive sensor Sensitive element Nonlinear error Calibration
Min-hua ZHANG Na ZHAO Xiao-hong HU Meng-jun ZHANG Wei LIU
Northwest Institute of Mechanical and Electrical Engineering, Xianyang, Shaanxi, China
国际会议
2018 International Conference on Defence Technology (2018国际防务技术会议)
北京
英文
918-921
2018-10-21（万方平台首次上网日期，不代表论文的发表时间）