Application of Two-dimensional Fourier Transform in Structured-illumination Microscopy
Dimensional topography of micro-structure plays an important role in addressing quality issues and achieving a better performance of micro-fabricated products.Structured-illumination is an incoherent method to measure the micro-topography of smooth objects with nm height resolution.However,traditional phase shift algorithm(PSA)need at least three graphs for contrast evaluation of each scanning position and is not conducive to real-time measurement.In this paper,the principle of two-dimensional Fourier transform algorithm(FTA)for contrast evaluation has been proposed.With this method,only one pattern is required to determine the contrast value of a whole field.Both theory and experiments are conducted in detail to demonstrate that the FTA can greatly level up the efficiency and achieve an improved robustness in a complex measurement environment with the potential to be applied in online measurement.
Zhong-ye XIE Yan TANG Yi ZHOU Chu-yi CHEN
国际会议
上海
英文
258-263
2017-12-30（万方平台首次上网日期，不代表论文的发表时间）