Square-Aperture Microlens Array Fabrication by the Moving Mask Technology
In this article,we researched on the fabrication of square-aperture microlens array by the moving mask technology,in order to solve the problems that microlens array is difficult to be gained and the traditional circular aperture microlens array has a very low filling factor.The steps of fabrication of microlens array contain mask preparation and photolithograph process.Moreover,photolithograph process includes three steps: photoresist coating,exposure and development.During the exposure process,the mask that we designed previously moves along the X axis and the Y axis,respectively.After developing process,the square-aperture microlens array will be gained.Through further experiments,square-aperture microlens array is applied in dynamic display film which requires microlens array with high filling factors and accurate focal length.In the end,a conclusion is drew that moving mask technology is effective to fabricate microlens array,which has an important meaning in those systems where the loss of optical information needs to be reduced.
Peng HUANG Xiao-chun DONG Chuan-wang HE
University of Chinese Academy of Sciences,Institute of Optics and Electronics,Optical electrical ave Institute of Optics and Electronics,Chengdu,Sichuan,China
国际会议
上海
英文
153-158
2017-12-30（万方平台首次上网日期，不代表论文的发表时间）