会议专题

Measurement of Argon emission spectral of ICP plasma using a diagnostic system based on photomultiplier tubes array

  Optical emission spectroscopy(OES)is one of the most important diagnostic tools in plasma physics.A self-built spectroscopic diagnostic system,owning temporal and spatial resolution,has been constructed using photo multiplier tubes(PMTs)array,spectrometer and other parts.The problem of superposition between inlet plane of bundle fiber and the focal plane of the spectrometer is analyzed and solved.In addition,the synchronization regulation of output of PMTs has been completed.This system is installed on an inductively coupled(ICP)plasma chamber in order to study the Argon(Ar)emission spectrum generated from typical radio frequency(RF)and pulse discharges.The test results show that the intensity of Ar emission spectrum increases with the power and pressure,but increase less with the flow and current ratio.Under pulse discharge condition,the intensity of spectrum does not change with the frequency,neither does the broadening of spectrum with time.

Weifeng Liu Yiyong Yang Chuankun Han Jia Cheng Linhong Ji

School of Engineering and Technology,China University of Geosciences(Beijing),Beijing 10083,China;Ke Department of Mechanical Engineering,Tsinghua University,Beijing 100084,China

国际会议

2017 International Conference on Electronic Information Technology and Computer Engineering (EITCE 2017)(2017电子信息技术与计算机工程国际会议)(EITCE2017)

珠海

英文

1-5

2017-09-23(万方平台首次上网日期,不代表论文的发表时间)