A Large Range Linear Displacement Calibration System Based on Coordinate Measurement and Laser Interference

摘要：

　　The linear displacement sensor is widely used in industrial measurement.The linear displacement sensor with measuring range less than 200mm is usually measured on a universal length measuring instrument.There is no good method to calibrate linear displacement sensor with measuring range larger than 200mm.The calibration system of linear displacement based on coordinate measurement and dual frequency laser interference is developed.The guide rail and measuring positioning system of coordinate measuring machine is used.The sampling signal of dual frequency laser interferometer is connected with the pulse signal triggered by coordinate measuring machine.The accurate position information of the linear displacement sensor is obtained and processed by industrial computer.According to JJF 1305-2011 Calibration Specification for Linear Displacement Sensor,a large range of linear displacement sensors is calibrated.The accuracy and reliability of linear displacement calibration system based on coordinate measurement and laser interference is verified.

作者: Zhihua Jiang Yanhua Zeng Zhenglong Cai

作者单位: Shanghai Institute of Measurement and Testing Technology,Shanghai,China School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200072,China

会议类型: 国际会议

会议名称: 2018 2nd International Conference on Electronic Information Technology and Computer Engineering (EITCE 2018)(2018第二届电子信息技术与计算机工程国际会议)(EITCE2018)

会议地点: 上海

会议语种:英文

页码: 1-5

在线出版日期: 2018-10-12（万方平台首次上网日期，不代表论文的发表时间）