Study on the performance of MOS-based displacement sensor

摘要：

　　The AZO film has a laser-induced lateral photovoltage(LPV): the saturation values of this photovoltage vary linearly with the position of laser spot.While,we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure.Sensitivity and saturation power are apparently improved,and the sensitivity reached 108.1mw/mm for the transient peak value.Maximum saturation voltage reached 72.1mw.This work demonstrates a novel way to increase sensitivity for position sensitive detectors.

作者: Baoshan Wang Lijie Cao

作者单位: College of Mechanical & Automotive Engineering,Shanghai University of Engineering Science,Shanghai,China

会议类型: 国际会议

会议名称: 2018 2nd International Conference on Electronic Information Technology and Computer Engineering (EITCE 2018)(2018第二届电子信息技术与计算机工程国际会议)(EITCE2018)

会议地点: 上海

会议语种:英文

页码: 1-4

在线出版日期: 2018-10-12（万方平台首次上网日期，不代表论文的发表时间）