STUDY ON IMPROVEMENT OF THE ACCURACY OF SEM-EDS QUANTITATIVE ANALYSIS WITHOUT REFERENCE MATERIALS

摘要：

　　With the development of science and technology,SEM-EDS with its advantages of convenience,easy operation and high reliability become the most widely used instrument in micro-beam analysis field.EDS sometimes is considered as a semi-quantitative or even qualitative instrument compared with WDS and other chemical methods in element type and composition analysis.However,SEM-EDS can provide accurate results if parameters are set properly.This paper discusses how to improve the accuracy of EDS quantitative analysis by changing SEM and EDS working conditions.

关键词： SEM EDS Quantitative analysis Working parameters

作者: C.Cao D.Zhao T.Peng Q.Guan Y.Tang

作者单位: Shandong Institute of Metrology,Jinan,Shandong,China

会议类型: 国际会议

会议名称: 国际测量技术联合会(IMEKO)2017年国际测量技术研讨会

会议地点: 杭州

会议语种:英文

页码: 75-78

在线出版日期: 2017-09-04（万方平台首次上网日期，不代表论文的发表时间）