Metrological Micro-Nano Step Height Measuring SystemBased on Laser Interferometer
Withthe development of MEMS(Micro Electro Mechanical Systems) and integrated circuit,the measurement of micro geometric dimensioning of micro-nano structure is becoming a hot topic in the field of precision measurement.White light interference microscopy is one of the most widely used non-contacting measurement methods at present,but using a grating scalewill cause large in position height in traditional way.In this article,a metrological micro-nano step height measuring system based on laser interferometer is proposed,in the system,CCD camera and Nanopositioning System are used to attain interference signal,combined with high resolution and low noise position laser interferometer,which can achieve the direct trace of the displacement of sample and location of each frame to the meter wavelength.The special structure was designed to keep overlap of main measuring beam of laser interferometer and interference beam center,which can ensure the system designed without abbe error.With the appliance of 3D reconstruction algorithm which can analyze the height data of measured sample from interference signal,thus the accurate measurement of micro-nano step height can be achieved.
S.Zhang Y.Shi S.Gao L.Pi Q.Li W.Li S.Li L Huang
National Institute of Metrology,No.18,Bei San Huan Dong Lu,Chaoyang Dist,100029,Beijing,China
国际会议
国际测量技术联合会(IMEKO)2017年国际测量技术研讨会
杭州
英文
311-311
2017-09-04（万方平台首次上网日期，不代表论文的发表时间）