AnalysisofUncertainty of DisplacementMeasurementUsing Fabry-Perot Interferometer
With the development of micro-and nano-technology,the requirement for accurate measurement of displacement is getting higher and higher in the precision engineering area.In various displacement measurement methods,Fabry-Perot interferometry has shown a unique advantage in high accuracy measurement of small displacement.Compared to the two-beam laser interferometer,which is widely used in precisiondisplacement measurements,the Fabry-Perot interferometer has intrinsic very high resolution,and thus can achieve higher accuracy in the measurement of displacement.A system for measuring small displacement using Fabry-Perot interferometry is described and its measurement uncertainty is analysed in this paper.The main factors that affect the measurement results of the Fabry-Perot interference system,such as the laser wavelength,the electronic system,the mechanical structure and the measurement environment,are analysed.The uncertainty of displacement measurement using the system is evaluated.This work can provide a reference for the application of Fabry-Perot interferometry in high accuracy measurement of small displacement.
D.Ren Z.Zhu X.Duan
Changcheng Institute of Metrology and Measurement,P.O.Box 1066,Beijing,China
国际会议
国际测量技术联合会(IMEKO)2017年国际测量技术研讨会
杭州
英文
313-313
2017-09-04（万方平台首次上网日期，不代表论文的发表时间）