Influence of AFM Probes on Surface Rigidity Analysis
The AFM rigidity analysis is realized by measuring the deformation caused by the pressure exerted on the material surface by the AFM probe.In the measurement process,the deformation is not only related to the rigidity of the material itself,but also affected by the shape and material of the probe.In this paper,force curves of three materials with different rigidity are measured using probes of different types,and Youngs modulus and rigidity of the materials are calculated using different data model.In this way,the influence of probe type and data model on the hardness measurement results of rigid materials,elastic materials and film materials can be analyzed,and probe types and the corresponding data model for different materials can be found.It is found that the rigid materials are not affected by the type of probe,and the elastic and thin film materials can obtain more accurate measurement results under the specific type of probe and data model.
Y.Tang C.Cao
Shandong Institute of Metrology,Shangdong Province,Jinan,China
国际会议
国际测量技术联合会(IMEKO)2017年国际测量技术研讨会
杭州
英文
314-314
2017-09-04(万方平台首次上网日期,不代表论文的发表时间)