Micro Patterns Fabrication by Electrochemical Machining with Laser Masking

摘要：

　　In order to fabricate the micro patterns with fine structures on 304 stainless steel,the method of combined machining of electrochemical micromachining(EMM)and laser masking was studied.As fiber laser marking on the surface of 304 stainless steel is carried out by laser heating,oxide layer with corrosion resistance can be formed on the surface of 304 stainless steel and the predefined patterns can be formed by fiber laser direct writing.In the next process of EMM,the laser masking patterns severs as the protective layer,the passivation electrolyte NaNO3 and the high-frequency-pulse power supply are adopted,which can suppress stray corrosion of electrochemical reaction,improve the localization of EMM processing and realize micromachining of micro cavity patterns.Influence factors on fabricating the masking layer by fiber laser were analyzed.Through the process experiments of EMM with laser masking,the influences of electrolyte concentration and machining voltage on machining accuracy were discussed.By optimizing machining parameter,the typical samples with the depth of about 23μm were fabricated.

关键词： Fiber laser Electrochemical machining Micro-machining Masking Stainless steel

作者: Li Xiaohai Wang Shuming Wang Dong

作者单位: School of Mechanical Engineering,Jiamusi University,Jiamusi,Heilongjiang,China School of Materials Science and Engineering,Jiamusi University,Jiamusi,Heilongjiang China

会议类型: 国际会议

会议名称: 第十七届国际制造会议(The 17th International Manufacturing Conference in China)(IMCC 2017))

会议地点: 深圳

会议语种:英文

页码: 1-6

在线出版日期: 2017-11-23（万方平台首次上网日期，不代表论文的发表时间）