Research of Micro Electro-discharge Machining Base on Liquid Metal Microelectrodes

摘要：

　　A novel micro electro-discharge machining(μEDM)method that utilizes liquid metal as the processing electrode is proposed,which is developed to address a variety of problems associated with the electrode wear.The conductive alloy liquid is supplied through a capillary nozzle such that the surface of the liquid appears on the bottom of the nozzle.A discharge pulse generator is connected between the liquid and workpiece,and the generated pulses thermally remove the workpiece material.Experimental results show that the discharge pulses could be generated and sustained with the liquid electrode stably and that these pulses generated on the silicon was effective to implement micro lines and arbitrary letters on its surfaces.Although the process consumes the liquid electrode similar to typical μEDM,the liquid metal can be continuously supplied to the nozzle tip to compensate for the consumption,thereby eliminating its impact on the removal process.EDX analysis indicates that the deposition or adsorption of the liquid electrode material on the processed surfaces was negligible.

关键词： μEDM Liquid Metal Microelectrodes Galinstan

作者: Huang Ruining Liu Xiaofei Han Shaofeng

作者单位: Harbin Institute of technology(Shenzhen),Shenzhen,518055,China

会议类型: 国际会议

会议名称: 第十七届国际制造会议(The 17th International Manufacturing Conference in China)(IMCC 2017))

会议地点: 深圳

会议语种:英文

页码: 1-6

在线出版日期: 2017-11-23（万方平台首次上网日期，不代表论文的发表时间）