Error Analysis in Measuring Thickness of Weak Rigidity Thin Parts by Non-contact Approach

摘要：

　　Weak rigidity thin parts are some critical components which are adopted in the applications of aerospace and military industries.The process of fabrication,measurement and assembling is very challenging due to the existence of mechanical deformations,especially in high precision measurement.This paper proposes a design for high precision non-contact thickness measuring of such parts by using heterodyne interferometry technique,infrared centering technique and chromatic confocal technology.An error model based on homogeneous transformation and error theory was established to analyze sensitivity and synthesis of the errors.Simulations based on the error model with a parabola workpiece was conducted to analyze the measuring error of thickness and the results clearly show that the design can achieve a high precision with the limit error of less than 0.5μm for thickness measurement of the workpiece with a diameter of 240 mm.The research work is helpful for the later detailed design of the mentioned non-contact measuring system.

关键词： weak rigidity thin parts thickness measuring error analysis sensitivity analysis

作者: Zhou Qing Xu Min Kong Lingbao

作者单位: Shanghai Engineering Research Center of Ultra-precision Optical Manufacturing,Department of Optics S Shanghai Engineering Research Center of Ultra-precision Optical Manufacturing,Department of Optics S

会议类型: 国际会议

会议名称: 第十七届国际制造会议(The 17th International Manufacturing Conference in China)(IMCC 2017))

会议地点: 深圳

会议语种:英文

页码: 1-7

在线出版日期: 2017-11-23（万方平台首次上网日期，不代表论文的发表时间）