Closed-Loop Control of MEMS Mirrors by Using Adaptive Sliding Mode Control and Observer
This paper compares the open-loop and closed-loop control for a commercial MEMS mirror actuated by an electrostatic staggered vertical comb(SVC)drive structure.The quasi-static and resonant mode operations of the MEMS mirror are exploited for maximizing the usage of its inherent flatness property.Based on a mechatronic micro mirror model,a flatness-based feed-forward control method using jerk-limited trajectories is employed to compensate undesired oscillations.For the closed-loop control,a sliding mode control algorithm including a sliding mode observer,both are discretized and implemented with a backward Euler integration method,for improvement of the command tracking performance in presence of model uncertainties.The simulation results of open-loop and closed-loop scenarios are compared,demonstrating its potential applications for industrial application in terms of feasibility and performance.Copyright c 2017 John Wiley & Sons,Ltd.
Adaptive Gain Second Order Sliding Mode Control Super-Twisting MEMS mirror
Chen Wenqi Xiong Xiaogang Jin Shanghai
Shenzhen Graduate School,Harbin Institute of Technology,Shenzhen 518055,China School of Engineering,Yanbian University,Yanji 133002,China
国际会议
第十七届国际制造会议(The 17th International Manufacturing Conference in China)(IMCC 2017))
深圳
英文
1-7
2017-11-23（万方平台首次上网日期，不代表论文的发表时间）