Flexible moment compensation for machining accuracy of the Ultra-precision micro compound machine tool
Submicron I nano-scale accuracy for the ultra-precision machine tools is sensitive to factors such as structure,material and environmental changes,and the realization of accuracy stability is a difficult problem.In this paper,the flexible moment compensation method is used,including the high rigidity of the marble base,high-rigidity base and the overall structure of the minimum flexible moment of the overall program is optimized design.The turning spindle components of the nano-scale accuracy is minimized in design,including the center of gravity and the shoulder restraints of the spindle weight,the flexible moment compensation of machine tools spindle end and sub bus nano accuracy is constructed.Combined with the same horizontal axis of the lead screw nut and the linear slider,the design of flexible moment without overturning is carried out.nano-level hydrostatic floats,high-precision high-speed ceramic ball milling spindle,high-precision direct drive B-axis turntable was developed,the air spring-Marble isolation bed is developed,and Power PMAC open ultra-precision control system in one of the ultra-precision turn-milling machine tools is developed.In the 22±℃ 0.5 air vibration noise isolation isolation environment,the machine tools has achieved the functions of turning,milling and turn-milling,and the machining accuracy is submicron accuracy.The radial run-out of turning spindle is better than 50nm,the radial run-out of milling spindle is better than 0.1μm,the accuracy of feed motion is 50nm,the machining surface roughness of turning reached 0.1μm,each axis repeat positioning accuracy is better than 0.5μm,the plane roughness of milling is 0.2μm.
Ultra-precision micro compound machine too1 Accuracy compensation Flexible moment deflection Ultra-precision measurement
SUN Yewang JIN Xin ZHANG Zhijing ZHENG Zhongpeng LI Qinming ZHANG Tianyi
School of Mechanical Engineering,Beijing Institute of Technology,Beijing 100081,China School of Mechanical Engineering,Beijing Forestry University,Beijing 100083,China
国际会议
第十七届国际制造会议(The 17th International Manufacturing Conference in China)(IMCC 2017))
深圳
英文
1-11
2017-11-23（万方平台首次上网日期，不代表论文的发表时间）