Design and Fabrication of a Novel MEMS Vibrating Ring Gyroscope
A novel vibrating ring gyroscope is proposed in this paper,and the structure employs axisymmetric ring resonator and capacitance transducers.Motion characteristics of the ring resonator and the setting of the capacitance electrodes are discussed in detail.The simulation results demonstrate that the natural resonant frequency of the operating mode of the gyroscope is 8.805 kHz and 8.807 kHz,and the frequency splitting is 2 Hz.The dynamic characteristics of the operating mode of the ring resonator are analyzed.The angular sensitivity model of the gyroscope is established.Finally,the vibrating ring gyroscope with capacitor electrodes is fabricated and its superiority is preliminaries confirmed.
MEMS vibrating ring gyroscope operating mode ring resonator
Zhiwei Kou Jun Liu Huiliang Cao Hengzhen Feng Jianjun Ren Qiang Kang Yunbo Shi
Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyu Science and Technology on Electronic Test and Measurement Laboratory,North University of China,Taiyu
国际会议
重庆
英文
131-134
2017-10-03（万方平台首次上网日期，不代表论文的发表时间）