Machine Allocation in a Semiconductor Wafer Fabrication System

摘要：

　　General queueing modeling method,Stochastic Timed Automation,is employed to model the Semiconductor Wafer Fabrication System because of its flexibility and fidelity.The machine allocation is formulated as a stochastic integer programming problem with the objective to optimize the throughput of the Semiconductor Wafer Fabrication System.And we propose an Optimal Computing Budget Allocation-based Stochastic Greedy Search algorithm to dynamically allocate machines,each time we allocate only one machine into the best performed station until all the machines are allocated into the Semiconductor Wafer Fabrication System.Numerical examples suggest our method is efficient to find a good allocation solution.

关键词： machine allocation simulation optimization greedy algorithm Optimal Computing Budget Allocation

作者: Yanfeng Wu Il-Gyo Chong

作者单位: School of Management Fudan University Shanghai,China 200433 Semiconductor R&D Center Samsung Electronics 1 Samsungjeonja-ro Hwaseong-si,Republic of Korea 445-33

会议类型: 国际会议

会议名称: 2017 IEEE 3rd Information Technology and Mechatronics Engineering Conference(ITOEC2017)(2017 IEEE 第3届信息技术与机电一体化工程国际学术会议)

会议地点: 重庆

会议语种:英文

页码: 287-290

在线出版日期: 2017-10-03（万方平台首次上网日期，不代表论文的发表时间）